VariousWords beta
Related Terms:
Noun
Definition: The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.
VariousWords beta
Definition: The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.